SUBSTRATE PROCESSOR AND PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate processor and a processing method with which maintenance work can be implemented accurately within a short period of time. SOLUTION: A moving image display MV1 displays dynamic images showing the maintenance method. A working person can understand the maintenance method by watching the dynamic images displayed on the dynamic image display MV1 of a manipulation panel 200. Accordingly, the maintenance work can be implemented accurately within the short period of time in accordance with dynamic images displayed on the dynamic image display MV1. COPYRIGHT: (C)2005,JPO&NCIPI