DEFECTIVE IMAGE COLLECTION METHOD AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a defective image even when a defect is present under an optically transparent film, in the case where the defect is observed by using an SEM based on defect position data outputted from a defect inspection device by an optical means. SOLUTION: An electronic optical system of an electron microscope is set in a first imaging condition; a defect position of a sample is so set as to be settled in a visual field of the electron microscope set in the first imaging condition by using position data of a defect of a sample obtained by inspecting the sample by using an inspection device; the position of the defect is imaged by the electron microscope set in the first imaging condition to obtain a first image of the defect position; the first image is processed to determine presence of the defect; the electronic optical system is set in a second imaging condition based on the result thereof; and the part imaged in the first condition is imaged by the electron microscope set in the second condition to obtain a second image of the defect position. COPYRIGHT: (C)2005,JPO&NCIPI