| 摘要 |
PROBLEM TO BE SOLVED: To appropriately inspect the transmitting performance of electro-optical devices at all times regardless of changes in the characteristics of a light source. SOLUTION: The inspection apparatus includes a light source for irradiating light to electro-optical devices (100 and 101); a moving table (41) having calibrating parts (421 and 422) for receiving and transmitting light from the light source for holding the electro-optical devices at locations different from the locations of the presence of the calibrating parts; a moving means for relatively moving the moving table with respect to the light source in such a way as to selectively irradiate light from the light source to either the calibrating parts or the electro-optical devices; and a light receiving means for receiving light transmitted through the electro-optical devices. COPYRIGHT: (C)2005,JPO&NCIPI
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