| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical element, hardly generating chipping in cutting an optical element as a simple substance from a base plate where two or more optical members are formed. SOLUTION: A quartz base plate 1 as shown in (a) is fixed by an UV pressure sensitive adhesive tape 2, and fixed to a dicing device table by vacuum suction. A cutting condition is input to a dicing device, and cutting of the quartz base plate 1 is started in flowing water. First, when a first side is cut, a plurality of strip-like members 3 as shown in (b) are completed with a groove part 4 interposed between them. A resist 5 as a fixing material is applied to the strip-like members 3 so that the groove part 4 is substantially concealed, and solidified. Subsequently, the dicing device table is turned in a 90-degree, and as shown in (d), a second side is cut to intersect perpendicularly to the first side with a blade 6. After that, the cut optical elements 7 are cleaned, and the resist 5 is dissolved and separated. COPYRIGHT: (C)2005,JPO&NCIPI |
