| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine grating manufacturing method by which trenches of narrow width can be formed on a base material by an inexpensive apparatus in a short time and a fine grating of a desired shape can be formed. SOLUTION: The fine grating manufacturing method for forming the fine grating 12 on the base material 10 has a process of forming a first mask film 20 having fine trenches 40 corresponding to a pattern of the fine grating 12 on a surface of the base material 10, a process of forming a second mask film 50 having fine recessed parts 51 of narrower width than that of the fine trenches 40 on the first mask film 20 at a position of the fine trench 40 of the first mask film 20, a process in which the second mask film 50 is etched by applying etching processing to the second mask film 50 to make the fine recessed part 51 reach the base material 10 surface while holding almost the same width and a process of etching the base material 10 below the fine recessed part 51 by applying etching processing to the base material 10 exposed by etching the second mask film 50 to form the fine grating 12. COPYRIGHT: (C)2005,JPO&NCIPI |
