发明名称 |
Potassium niobate deposited body, method for manufacturing the same, piezoelectric thin film resonator, frequency filter, frequency oscillator, electronic circuit, and electronic apparatus |
摘要 |
A potassium niobate deposited body includes a substrate, an electrode layer formed above the substrate, and a potassium niobate layer formed above the electrode layer. The potassium niobate layer can include a domain that epitaxially grows in a (110) or (001) orientation, when a lattice constant of orthorhombic potassium niobate is 2<SUP>1/2 </SUP>c<a<b, and a b-axis is a polarization axis.
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申请公布号 |
US2005206271(A1) |
申请公布日期 |
2005.09.22 |
申请号 |
US20050079241 |
申请日期 |
2005.03.14 |
申请人 |
HIGUCHI TAKAMITSU;IWASHITA SETSUYA;MIYAZAWA HIROMU |
发明人 |
HIGUCHI TAKAMITSU;IWASHITA SETSUYA;MIYAZAWA HIROMU |
分类号 |
C30B29/30;C23C14/08;H01L41/08;H01L41/083;H01L41/09;H01L41/18;H01L41/22;H01L41/24;H03B5/32;H03H3/02;H03H9/02;H03H9/17;(IPC1-7):H01L41/08 |
主分类号 |
C30B29/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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