Method of manufacturing ceramic body and firing jig

摘要

There are disclosed a manufacturing method and a firing jig capable of obtaining a ceramic body having a diaphragm structure having lower deflection of a thin portion. There is provided a method of manufacturing a ceramic body comprising a step of firing a formed body having a diaphragm structure including a thick portion and a plate-like thin portion disposed in such a manner that a concave portion or a hollow portion is formed by the thin and thick portions. In the method, firing is started in a state in which a thermal buffer is disposed in a position covering the thin portion in a contact or non-contact state with respect to the thin portion. There is provided a firing jig comprising: a thermal buffer portion formed of porous ceramic; a spacer disposed on one surface of the thermal buffer portion; and a weight adjusting portion disposed in non-contact with respect to the thermal buffer portion via the spacer. A space is formed between the thermal buffer portion and the weight adjusting portion.