USE OF MIXED BASES TO ENHANCE PATTERNED RESIST PROFILES ON CHROME OR SENSITIVE SUBSTRATES
摘要
Resist compositions having good footing properties even on difficult substrates are obtained by using a combination of base additives including a room temperature solid base, and a liquid low vapor pressure base. The compositions are especially useful on metal substrates such as chromium-containing layers commonly used in mask-making.
申请公布号
WO2005088393(A1)
申请公布日期
2005.09.22
申请号
WO2004US04144
申请日期
2004.02.11
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;MOREAU, WAYNE, M.;ANGELOPOULOS, MARIE;HUANG, WU-SONG;MEDEIROS, DAVID, R.;PETRILLO, KAREN, E.
发明人
MOREAU, WAYNE, M.;ANGELOPOULOS, MARIE;HUANG, WU-SONG;MEDEIROS, DAVID, R.;PETRILLO, KAREN, E.