SCANNING SYSTEMS AND METHODS WITH TIME DELAY SENSING

摘要

Methods and systems that excite a test structure with an excitation beam and then sense the response of the test structure after some prescribed time interval with respect to the excitation. One or more detectors detect an emission from the test structure at a location of the test structure that is offset from a position on the test structure that is coincident with the excitation beam as the beam is scanned across the test structure.