| 摘要 |
An electrostatic micro-actuator has a generated force which is a linear function of the signal voltage applied to a common electrode. A common electrode 3a, 3b is suspended for mobility and two other electrodes 1, 2 are in fixed relationship on either side. The common electrode may have the form of a back-to-back comb shape, in interlocking relationship with each of the other two comb electrodes. A method of making the device includes etching a conductive silicon layer of a silicon-on-insulator structure, down to an etch stop layer (figs 8A-8D). The dimensions of the fixed electrodes are greater than those of the mobile electrode so that a limited etch of the etch stop layer releases the common electrode but leaves the outer electrodes anchored by remaining material of the etch stop layer. |
