发明名称 CAPACITANCE MEASURING CIRCUIT, CAPACITANCE MEASURING INSTRUMENT, AND MICROPHONE DEVICE
摘要 <p>An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16, and a capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential. The electrostatic capacitance detection circuit 10 and the capacitor 17 are located adjacently. <IMAGE></p>
申请公布号 EP1426773(A4) 申请公布日期 2005.09.21
申请号 EP20020767922 申请日期 2002.09.06
申请人 TOKYO ELECTRON LIMITED 发明人 YAKABE, MASAMI;IKEUCHI, NAOKI
分类号 G01N27/06;G01N27/22;G01R27/26;H04R29/00;(IPC1-7):G01R27/26;G01D5/24;H04R3/06 主分类号 G01N27/06
代理机构 代理人
主权项
地址