POLYCARBOCYCLIC DERIVATIVES FOR MODIFICATION OF RESIST, OPTICAL AND ETCH RESISTANCE PROPERTIES
摘要
<p>Mixed carbocycle derivatives containing at least two carbocycles per molecule from the group of anthracenes, adamantanes and steroids with functionalized carbon chains are synthesized and used as modifiers of resist properties and especially etch resistance enhancement and absorption characteristics. These derivatives are characterized by formulas I-V, where A and R may be an anthryl- and/or an adamantyl- and/or a steroid moiety. Methods for the preparation of the above compounds are disclosed.</p>
申请公布号
EP1444550(B1)
申请公布日期
2005.09.21
申请号
EP20020790329
申请日期
2002.10.31
申请人
NCSR DEMOKRITOS;GOGOLIDES, EVANGELOS;ARGITIS, PANAGIOTIS;COULADOUROS, ELIAS, ANDREA
发明人
GOGOLIDES, EVANGELOS;ARGITIS, PANAGIOTIS;COULADOUROS, ELIAS, ANDREA;VIDALI, VERONIKI, PETROU;VASILOPOULOU, MARIA;CORDOYIANNIS, GEORGE