| 发明名称 |
Electron microscopy system |
| 摘要 |
A particle-optical apparatus is disclosed which combines the functions of an energy selector 27 and a beam splitter 21. The particle-optical apparatus is used in an electron microscopy system and serves to separate and superimpose, respectively, beam paths of a primary electron beam 11 and a secondary electron beam 13.
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| 申请公布号 |
US6946657(B2) |
申请公布日期 |
2005.09.20 |
| 申请号 |
US20030631748 |
申请日期 |
2003.08.01 |
| 申请人 |
CARL ZEISS NTS GMBH |
发明人 |
KIENZLE OLIVER;KNIPPELMEYER RAINER;MUELLER HEIKO |
| 分类号 |
G01Q30/04;H01J37/05;H01J37/147;H01J37/244;H01J37/28;(IPC1-7):H01J37/256 |
主分类号 |
G01Q30/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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