摘要 |
An MESFET is configured wherein a semiconductor layer structure including an i-AlGaAs buffer layer, an n-AlGaAs electron supply layer having an impurity doping density ranging from 1x10<SUP>17 </SUP>cm<SUP>-3 </SUP>to 1x10<SUP>18 </SUP>cm<SUP>-3 </SUP>and a layer thickness ranging from 1 nm to 10 nm, and an n-GaAs channel layer, all of which are sequentially deposited from the semi-insulating GaAs substrate side, is disposed on the semi-insulating GaAs substrate, a gate electrode is provided on the n-GaAs channel layer, and a source electrode and a drain electrode opposite to each other with the gate electrode interposed therebetween are provided.
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