发明名称 |
Method and system for improving the efficiency of a mechanical alignment tool |
摘要 |
A technique is disclosed that allows alignment of substrates on a run-to-run basis by using the position data of one or more previously aligned substrates to determine a setpoint of a pre-alignment process for one or more subsequent substrates. The setpoint may also be determined on the basis of a predefined characteristic of the substrates to be aligned.
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申请公布号 |
US6946411(B2) |
申请公布日期 |
2005.09.20 |
申请号 |
US20030621663 |
申请日期 |
2003.07.17 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
KNAPPE UWE;RAEBIGER JAN;SCHULZE UWE;SELTMANN ROLF |
分类号 |
G05B19/19;(IPC1-7):H01L21/00 |
主分类号 |
G05B19/19 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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