发明名称 |
Polishing pad conditioner and methods of manufacture and recycling |
摘要 |
A recycled polishing pad conditioner comprises a base plate and a reversed abrasive disc that is flipped over from its original configuration. The reversed disc comprises an exposed abrasive face having an unused abrasive face comprising abrasive particles. A bond face of the disc is affixed to the base plate, the bond face comprising a used abrasive face that was previously used to condition polishing pads. Also described is a pad conditioner having an abrasive face comprising exposed portions of abrasive particles, with at least about 60% of the abrasive particles having a crystalline structure with substantially the same crystal symmetry.
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申请公布号 |
US6945857(B1) |
申请公布日期 |
2005.09.20 |
申请号 |
US20040888941 |
申请日期 |
2004.07.08 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DOAN TRUNG;BALAGANI VENKATA R.;NGAN KENNY KING-TAI |
分类号 |
B24B1/00;B24B37/04;B24B53/007;B24B53/12;(IPC1-7):B24B1/00 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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