发明名称 Scanning probe microscope with improved probe tip mount
摘要 A mounting mechanism for the probe tip of a Scanning Probe Microscope (SPM) includes a scanner supported by a stationary frame, and a kinematic mechanism supported by the scanner. The kinematic mechanism includes at least three protrusions and at least one magnet. The mounting mechanism for the probe tip also includes a chip mount having a hole, a slot and a flat surface. The chip mount, on being held by the magnet, provides an easy way to mount the probe tip without requiring any tools.
申请公布号 US6945100(B2) 申请公布日期 2005.09.20
申请号 US20030748827 申请日期 2003.12.29
申请人 PSIA CORPORATION 发明人 KWON JOONHYUNG;KIM YOUNG SEOK;PARK SANG-IL
分类号 G01B21/30;G01Q10/02;G01Q10/04;G01Q20/02;G01Q30/00;G01Q60/32;G01Q60/38;G01Q70/02;G01Q70/10;H01J37/26;(IPC1-7):G01N13/16;G01B5/28 主分类号 G01B21/30
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