发明名称 Robust interlocking via
摘要 The invention provides a via with improved resistance to failures due to delamination voids. In one embodiment, the via may extend from above to below a bottom conductor and include an anchor section. The anchor section may mechanically interlock the via with the bottom conductor to prevent the via from being detached from the bottom conductor.
申请公布号 US6946737(B2) 申请公布日期 2005.09.20
申请号 US20040917140 申请日期 2004.08.11
申请人 INTEL CORPORATION 发明人 SIR JIUN HANN;SIM KIAN SIN
分类号 H01L23/498;H05K3/00;H05K3/42;(IPC1-7):H01L23/48 主分类号 H01L23/498
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