发明名称 Torsional resonance mode probe-based instrument and method
摘要 An apparatus and method of operating a probe-based instrument in a torsional mode. The method includes providing a probe having a cantilever defining a longitudinal axis and supporting a tip. In operation, the method torsionally oscillates the probe generally about the longitudinal axis at a resonance. In addition, the method changes a separation distance between the tip and a surface of a sample so the tip interacts with the surface during data acquisition. By detecting a change in the torsional oscillation of the cantilever in response to the interaction between the tip and the surface, forces, including shear forces and shear force gradients, between the tip and the surface can be measured to determine sub-nanometer features.
申请公布号 US6945099(B1) 申请公布日期 2005.09.20
申请号 US20020189108 申请日期 2002.07.02
申请人 VEECO INSTRUMENTS INC. 发明人 SU CHANMIN;BABCOCK KENNETH L.;HUANG LIN
分类号 G01Q10/06;G01Q60/26;(IPC1-7):G01B5/28 主分类号 G01Q10/06
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