Method for measuring product parameters of components formed on a wafer and device for performing the method

摘要

A measuring arrangement for measuring product parameters of a component in the epitaxial layer ( 28 ) of a wafer comprises measuring probe ( 3 ) on whose contact side ( 23 ) a recess ( 24 ) is installed, into which an electrolyte can be poured. The electrolyte produces an electrical connection between a contact body ( 11 ), which is charged with a signal from a pulsed-current source, and the surface ( 22 ) of the wafer ( 2 ). A detector ( 16 ) serves for detecting the light which is emitted by the component.