发明名称 Process for producing ultrathin homogenous metal layers
摘要 A method of forming an ultrathin homogenous metal layer that serves as base metallization for formation of contact locations and/or contact pads and/or wirings of an integrated electronic component. The method includes the steps of depositing a first metal layer on a substrate at least in regions, and producing a second metal layer on the first metal layer at least in regions, component(s) of the second metal layer have a more positive redox potential than component(s) of the first metal layer, wherein ultrathin homogenous deposition of the second metal layer is effected by wet-chemical, current-free, electrochemical redox processes by element exchange from one or more metal salts as oxidant with at least a top metal atomic layer of the first metal layer as reductant.
申请公布号 US6946386(B2) 申请公布日期 2005.09.20
申请号 US20040854759 申请日期 2004.05.25
申请人 INFINEON TECHNOLOGIES AG 发明人 STEINLESBERGER GERNOT;ENGELHARDT MANFRED;UNGER EUGEN
分类号 C23C18/31;C23C28/02;(IPC1-7):H01L21/476 主分类号 C23C18/31
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