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发明名称
正型光阻组成物及光阻图型之形成方法
摘要
(1)使用正型光阻组成物,藉由使用KrF准分子雷射之通常曝光,形成150nm之线与间隙成为1对1之图型时之感度为X1,在与前述通常曝光所致步骤同样之步骤中,在曝光与曝光后加热之间增加使前述溶剂与光阻膜接触之步骤的模拟式浸渍微影术步骤,使形成同样图型时之感度为X2,〔(X2/X1)-1〕×100之绝对值为5以下,且(2)可配合具有羟基苯乙烯单元之树脂成分(A)之浸渍曝光步骤用之正型光阻组成物。094102361-p01.bmp
申请公布号
TW200530749
申请公布日期
2005.09.16
申请号
TW094102361
申请日期
2005.01.26
申请人
东京应化工业股份有限公司
发明人
山田知孝;高山寿一;平山拓
分类号
G03F7/004
主分类号
G03F7/004
代理机构
代理人
林志刚
主权项
地址
日本
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