发明名称 METHOD AND APPARATUS FOR MONITORING PARTS IN A MATERIAL PROCESSING SYSTEM
摘要 <p>The present invention presents an improved apparatus and method for monitoring parts in a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive part identifiers coupled to the processing tool to generate and transmit part ID data, and a sensor interface assembly (SIA) configured to receive the part ID data from the plurality of RF-responsive part identifiers.</p>
申请公布号 KR20050092025(A) 申请公布日期 2005.09.16
申请号 KR20057012302 申请日期 2003.11.25
申请人 TOKYO ELECTRON LIMITED 发明人 KLEKOTKA JAMES E.
分类号 G05B19/418;H01J37/32;(IPC1-7):G05B19/418;H01L21/306 主分类号 G05B19/418
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