发明名称 |
Method for producing coated workpieces, uses and installation for the method. |
摘要 |
The method concerns production of workpieces with coatings of a sufficient epitaxy quality, and is characterised by the fact that coating takes place by PECVD (plasma enhanced chemical vapour deposition) process with use of DC discharge. The claimed installation for implementation of the method includes a vacuum chamber (1), a cathode chamber (5) with at least one hot anode (7), a workpiece carrier (13) in the vacuum chamber, and an anode . The workpiece carrier is electrically insulated from the vacuum chamber. |
申请公布号 |
HK1028070(A1) |
申请公布日期 |
2005.09.16 |
申请号 |
HK20000107473 |
申请日期 |
2000.11.22 |
申请人 |
UNAXIS TRADING AG |
发明人 |
HANS VON KANEL;CARSTEN ROSENBLAD;JURGEN RAMM |
分类号 |
C23C16/503;C23C16/505;C23C16/511;C30B25/02;C30B25/10;C30B29/52;H01J37/32;H01L21/205 |
主分类号 |
C23C16/503 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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