发明名称 METHOD OF SUPPRESSING WEAR OF DIAMOND TOOL IN SPECULAR CUTTING OF COPPER
摘要 PROBLEM TO BE SOLVED: To propose a cutting method for suppressing the wear of a diamond tool to improve the service life of the tool in super-precision cutting of a cut material such as oxygen free copper. SOLUTION: A mono-crystal diamond tool is used as the diamond tool, and at least the periphery of a cutting point is put in an atmosphere with oxygen partial pressure of about 8 KPa to perform cutting. As a method of changing the periphery of the cutting point into the atmosphere of low oxygen partial pressure, nitrogen gas is jetted to the periphery of the cutting edge of the mono-crystal diamond tool. The unevenness of a cutting edge ridgeline of the mono-crystal diamond tool is preferably set to 1μm or less. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005246504(A) 申请公布日期 2005.09.15
申请号 JP20040056944 申请日期 2004.03.02
申请人 ALLIED MATERIAL CORP;HIGUCHI MASAHIRO;SHIMADA SHOICHI 发明人 HIGUCHI MASAHIRO;SHIMADA SHOICHI;OBATA KAZUSHI
分类号 B23B5/00;B23B27/20;(IPC1-7):B23B5/00 主分类号 B23B5/00
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