MULTILAYER CERAMIC ELECTRONIC PART, CIRCUIT SUBSTRATE, ETC., AND CORRESPONDING PARTS, CIRCUIT SUBSTRATE, ETC., AND METHOD OF MANUFACTURING CERAMIC GREEN SHEET PROVIDED TO MANUFACTURE CORRESPONDING PARTS, SUBSTRATE, ETC.

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an electronic part which can deal with the miniaturization of multilayer electronic part, raising of performance, improvement of quality. SOLUTION: A ceramic green sheet is obtained by the steps of forming an internal electrode having a predetermined thickness by an arbitrary method on a substrate or a layer formed on the substrate; forming a photosensitive ceramic slurry in its thickness immediately before exposure of substantially the same as or less thickness than the thickness of the internal electrode from the substrate, or the surface of the layer on the surface of the internal electrode; irradiating light to the photosensitive ceramic slurry from the upper surface side of the substrate, performing exposure while the internal electrode pattern is used as a mask, controlling the amount of its exposure so that the surface of the photosensitive ceramic slurry is solidified, and selectively solidifying the surface of the photosensitive ceramic slurry; removing the non-exposed part of the photosensitive ceramic slurry by a developing treatment and exposing the internal electrode pattern. COPYRIGHT: (C)2005,JPO&NCIPI