| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To deposit a surface coating film promoting the releasing properties of an IC (Integrated Circuit) from a mold fixture, to reduce the stopping time of a system for mold cleaning, and to elongate the service life of the system. <P>SOLUTION: In the method for coating the surface of a substrate, different types of electric powers are applied to the substrate and various targets. The method is accompanied by the formation of a layered structure in a coating. In its formation, a metal layer is first formed, an intermediate layer is made present thereon, a functional layer as the uppermost part continues thereon, and the functional layer as the upper most part is composed of a chromium oxide composite body. One of the electric power is high frequency electric power, and it is particularly used for increasing the efficiency in the ionization and decomposition of reactive gas in the system. The other electric current controlled in a pulse formation system is applied to the substrate for improving the alignment of ions and atoms vapor-deposited on the coating surface. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
