| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser device that can obtain a stable laser output, immediately after a laser oscillator has started by setting the oscillator in a normal state by automatically executing warming up, when the oscillator is not in the normal state at rising time, and in addition, when a stable laser output is not obtained during the period decided by a prescribed limiting condition due to some abnormality, can avert the operation under incorrect correction coefficient, by stopping the oscillator through issuing of an alarm. <P>SOLUTION: Immediately before the discharge from the oscillator starts after power supply is made, the initial value of the number of warming operation (index value) is set to 0 [S1], and whether the temperature of the prescribed spot of the oscillator reaches a prescribed value is decided by measuring the temperature by means of a temperature-measuring means [S2 and S3]. If the decision result is "yes", the normal rising process of the oscillator is executed and a sequence is terminated by performing the calculation/updating of a power correction factor during the execution of the rising process [S10-S16]. If the decision result is "no", the number of warming operation is checked [S4], and the warming operating is executed until a prescribed temperature is obtained, within the limit of a prescribed number of times [S20-S26]. When the number of warming operation exceeds a prescribed number of times, the procedure proceeds to a step [S30], and the operation of the oscillator is stopped by displaying an alarm [S31]. It is also possible to utilize the internal discharge performed at the finding of the power correction factor for the warming operation. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
