| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device capable of preventing arc from being generated between an insulating member and a conductive member. <P>SOLUTION: The plasma treatment device M blows out treatment gas passed into a plasma space 30a between electrodes 31, 32 toward a work W arranged below (outside the space 30a). The insulating member 40 is arranged at an underside (an opposite side of the work W), and underneath the insulating member 40, the conductive member 42 is arranged with a gap 40b in between in an electrically grounded state. A dielectric constant and a thickness of the insulating member 40 are so set that a voltage impressed on the gap 40b be smaller than spark voltage. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
