| 摘要 |
PROBLEM TO BE SOLVED: To improve circuit simulation accuracy for propagation delay time and consumed power of a semiconductor integrated circuit, by making the accuracy of SPICE parameters improved by grasping accurate DC characteristics of a MOS transistor used in a CMOS logical circuit. SOLUTION: In a present semiconductor device, there are provided a ring oscillator 22 and a monitor 7 on the same wafer (not shown). In the ring oscillator 22, two lines of a plurality of CMOS logical circuits (not shown) are disposed, and CMOS transistors of the one line among these two lines are disposed point-symmetric, with respect to the CMOS transistors of the other line. In the monitor 7, there are provided monitoring CMOS transistors 26a, 26b corresponding to each layout direction of the two lines of the CMOS logical circuits in the ring oscillator 22. Consequently, even the errors caused by different layout directions can be monitored. COPYRIGHT: (C)2005,JPO&NCIPI
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