ELECTROSTATIC CAPACITY TYPE LOAD CELL

摘要

PROBLEM TO BE SOLVED: To provide a electrostatic capacity type load cell capable of raising measurement accuracy of a load cell without being affected by the variation of ambient temperature, attaining a compact size and easily selecting a material for inductors. SOLUTION: Inductors 1 and 4 with different temperature characteristics are layered by putting electrodes 2 and 3 and electrodes 3 and 5 in between. An electrostatic capacity in each of inductors 1 and 4 is measured. By simultaneously analyzing a plurality of equations of electrostatic capacity given as functions of load and a plurality of equations of inductance given as functions of temperature, the load is calculated in the constitution. COPYRIGHT: (C)2005,JPO&NCIPI