| 摘要 |
PROBLEM TO BE SOLVED: To provide an analyzing method and its device for impurity in mixed gas, to highly accurately and continuously measure impurity components included in a mixed gas of a relatively large amount of oxygen with a rare gas, the oxygen having ionization potential lower than that of an impurity component being a measuring object. SOLUTION: The mixed gas mainly composed of the rare gas and oxygen is introduced at a pressure lower than the atmospheric pressure into a discharge tube 12 with its electrode impressed with an AC voltage. Light specific to an impurity included in the mixed gas is extracted from light generated by electric discharge in the discharge tube to detect its light emission intensity, while measuring rare gas concentration in the mixed gas or oxygen concentration. The detected emission intensity is corrected correspondent to the measured rare gas concentration or oxygen concentration to calculate impurity concentration. COPYRIGHT: (C)2005,JPO&NCIPI
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