| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive ceramic composition capable of sufficiently suppressing light scattering in a sheet in an exposure process even when inorganic powder is a mixture composed of powder drastically varying in optical characteristics, especially refractive indices, since shape processing of a high aspect ratio is performed by using a photolithography method. <P>SOLUTION: The photosensitive ceramic composition is composed of an inorganic component and a photosensitive organic component as essential components, wherein the inorganic component contains inorganic particulates having an average particle size of at least <1/2 the exposure wavelength and inorganic powder having an average particle size of ≥1/2 the exposure wavelength and the refractive index (nA) of the component composed of the inorganic particulates and the photosensitive organic component and the refractive index (nB) of the inorganic powder satisfy the following formula: -0.1<nA-nB<0.1. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
