| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray diffraction system for coping with the shaking of a sample stage. SOLUTION: A monochrometer 4 is used for projecting X rays onto a sample 14 from an X-ray tube 2 as convergent beams. The sample 14 is present in a growth chamber. The sample is rotated, and diffraction measurement is made in parallel by a multiple channel detector 22. A specific reflection is used so that intensity to an angle measured by the multiple channel detector can give information regarding a vertical lattice parameter. Measurement and adding up are made quickly to complement shaking generated inevitably by the rotation of the sample. COPYRIGHT: (C)2005,JPO&NCIPI
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