发明名称 Method of manufacturing nitride based semiconductor light-emitting device
摘要 Nitride based semiconductor light-emitting devices with a sufficiently low contact resistance p-type electrode and a method of manufacturing the same are disclosed. One such method of manufacturing nitride based semiconductor light-emitting devices includes steps of growing island-like AlGaN films 17 on p-type nitride based semiconductor layer 16, etching a surface of p-type type nitride based semiconductor layer 16 to make uneven portions 18 on its surface by using island-like AlGaN films 17 as a photomask, and forming of a p-type ohmic electrode on an electrode forming region of the uneven portion 18.
申请公布号 US2005202581(A1) 申请公布日期 2005.09.15
申请号 US20050116825 申请日期 2005.04.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SUGAWARA HIDETO
分类号 H01L21/28;H01L21/205;H01L21/302;H01L33/06;H01L33/22;H01L33/32;H01L33/38;(IPC1-7):H01L21/20 主分类号 H01L21/28
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