| 摘要 |
A method and apparatus for supercritical processing of an object with a fluid. The apparatus comprises means (180) for injecting a processing fluid and chemistry into the system, including means for starting and means for stopping the means (180) for injecting, and means (160) for substantially preventing fluid from re-entering the means (180) for injecting. The method includes the steps of selectively injecting a processing fluid and chemistry. Also, the method includes substantially preventing fluid from returning to the source. |
