Verfahren für die Kalibrierung eines Wire Bonders

摘要

Method involves placing capillary tube (10) on contact region of sensor, applying bonding force, and detecting amplitude of ultrasound sensor signal. Correction factor is determined by placing capillary on contact region of same sensor or different sensor of same type, applying bonding force, and determining correction factor such that amplitude of sensor signal assumes reference value when ultrasound generator is set a given value.