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发明名称
VAKUUMSYSTEM FÜR EINE VORRICHTUNG ZUR BEHANDLUNG EINES BEHÄLTERS MITTELS NIEDERDRUCKPLASMA
摘要
申请公布号
AT303656(T)
申请公布日期
2005.09.15
申请号
AT20000971478T
申请日期
2000.10.23
申请人
SIDEL ACTIS SERVICES
发明人
RIUS, JEAN-MICHEL
分类号
H05H1/46;B65D1/00;B65D25/02;C23C16/04;C23C16/455;C23C16/50;C23C16/505;H01J37/32;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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