| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sealing unit, adjusting its position to a chamber and having excellent durability. <P>SOLUTION: Neither a gasket nor an O-ring is provided between a flange part 11b and a chamber 1, whereby the flange part 11b can be fixed to an arbitrary position of the wall surface of the chamber 1, so that the position of a rotating shaft 2 can be easily adjusted. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
