| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a base material of a polishing carrier, which is easily separated from a polishing surface when the base material is mounted and dismounted on a polishing apparatus. <P>SOLUTION: A plurality of prepreg sheets 14, which are made by impregnating thermosetting resin into the base material and by drying them, are overlapped and are formed by heating and pressing them. Embossed undulations are formed on the surface of the prepreg sheets. The height of the undulations is within a range from 10 to 50 μm. As a result, when the polishing carrier 1 formed with this polishing carrier base material on the polishing apparatus is separated from the base material after workpieces have been polished by mounting the polishing carrier 1, the polishing carrier 1 is easily separated from the polishing surface by preventing the close contact of the surface of the polishing carrier 1 with the polishing surface. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
