| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum pump, not susceptible to corrosion by corrosive gas and having a shaft seal securing smooth operation. <P>SOLUTION: Shaft seal structure 17 is disposed to outer peripheral faces of bearing bodies 16M, 16FM positioned at the inside of approximately cylindrical screw rotors 13M, 13FM. The shaft seal structure 17 constitutes a static pressure seal. Seal gas is introduced from the bearing bodies 16M, 16FM to between the outer peripheral faces of the bearing bodies 16M, 16FM and inner peripheral faces of rotor cylinders of the screw rotors 13M, 13FM. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
