| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device capable of performing high precision polishing by stabilizing the flow state of a polishing fluid when jetting gas from a spray nozzle, to allow the stable polishing fluid to collide with a polished object, and to provide a polishing method, an optical element and an exposure device. SOLUTION: In this polishing device 10, a polished object is dipped in the polishing fluid 3 in a polishing fluid vessel 11, and the gas 2 is jetted to the surface of the polished object 4 from the spray nozzle 1 to polish the surface. The whole spray nozzle 1 is formed of a water repellent material. COPYRIGHT: (C)2005,JPO&NCIPI |
