| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device whose structure is simple, manufacturing cost is low, and size perpendicular to an electric substrate can be made small, and to provide a camera shake correction unit using the stage device. SOLUTION: The stage device comprises: a fixed support substrate and the electric substrate which are parallel to each other; a guide mechanism which guides the electric substrate so as to be movable in an X direction and a Y direction orthogonal to each other with respect to the fixed support substrate within a plane to which the electric substrate belongs; and an electromagnetic system X-direction moving device and an electromagnetic system Y-direction moving device which relatively move the electric substrate in the X direction and the Y direction with respect to the fixed support substrate. The X-direction moving device and the Y-direction moving device include: a drive coil in which a current flows; and a magnetic force generating device which applies a magnetic force to the drive coil and relatively linearly moves the drive coil in its driving direction. In such a stage device, the drive coil is a flat plane coil in which windings are located within a flat plane parallel to the electric substrate. The drive coil is provided on one of the fixed support substrate and the electric substrate, whereas the magnetic force generating device is provided on the other. COPYRIGHT: (C)2005,JPO&NCIPI |
