发明名称 |
METHOD AND RELATED SYSTEM FOR SEMICONDUCTOR EQUIPMENT EARLY WARNING MANAGEMENT |
摘要 |
A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment. |
申请公布号 |
US2005203715(A1) |
申请公布日期 |
2005.09.15 |
申请号 |
US20040708573 |
申请日期 |
2004.03.11 |
申请人 |
TAI HUNG-EN;CHEN CHIEN-CHUNG;LUO HAW-JYUE;WANG SHENG-JEN |
发明人 |
TAI HUNG-EN;CHEN CHIEN-CHUNG;LUO HAW-JYUE;WANG SHENG-JEN |
分类号 |
G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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