| 摘要 |
PROBLEM TO BE SOLVED: To provide a high current density ion beam in which electric power consumption is low (50 W or lower), kinetic energy and an energy diffusion rate are low at an initial stage, the temperature of ions included in the beam is also slightly higher than room temperature (approximately 27°C) and magnetic-field confinement and water cooling are unnecessary for a beam source. SOLUTION: The beam source is provided with (1) a 2.45 GHz microwave source exciting plasma in a plasma gas source, (2) a DC power source generating electron avalanche multiplication in the plasma gas source, (3) a cathode electrode supplying secondary electrons by ion impact and (4) a vacuum device to make pressure in a plasma gas source external part approximately 10<SP>-4</SP>mbar or lower. COPYRIGHT: (C)2005,JPO&NCIPI
|
