| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel deflection angle detector capable of detecting a static deflection angle of a movable plate. SOLUTION: An actuator has the deflectable movable plate 112, a driving coil 122 run around on movable plate, and a permanent magnets 132 for driving arranged both sides of the movable plate 112. This deflection angle detector includes the driving coil 122 on the movable plate, and is provided with a magnetic thin film 142 formed on the movable plate, a permanent magnet 152 for detecting the deflection angle for generating an external magnetic field acting on the magnetic thin film 142, and an inductance detecting part for detecting a variation of an inductance in the driving coil 122 generated by an inclination change of the magnetic thin film 142 on the movable plate with respect to the external magnetic field. The inductance detecting part has a drive controller 162 and an inductance detector 164. The inductance detector 164 is provided with a high-frequency signal source 166 for detecting the inductance, and a voltage measuring instrument 168 for measuring voltages in both ends of the driving coil 122. COPYRIGHT: (C)2005,JPO&NCIPI
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