| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lamination apparatus without the impairment of the acceleration in the direction of the rotation axis of a lamination type optical disk and increasing an R-Tilt value when corrective lamination is performed during irradiation with light. <P>SOLUTION: A correcting stage comprises ring-formed outer peripheral projecting part and inner peripheral projecting part for receiving substrates, a height adjusting unit configured to control at least one of the height of the ring-formed outer peripheral projecting part and the height of the ring-formed inner peripheral projecting part, wherein the radius of the height controlling unit is less than the radius of the placed substrates. An inner periphery fixing means configured to fix the inner periphery of the substrates by pressing to correct the warpage of the substrates is provided at the stage inner periphery. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
