| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining device, by which the displacement of an incident position of a laser beam, which is generated on the surface to be machined and caused by the positional displacement of a stage, is corrected at a high speed. <P>SOLUTION: The laser beam machining device has a laser beam source 1, a workpiece 5 having a surface to be machined, a stage 6 for moving the workpiece in parallel with the surface to be machined, and a beam incident position displacing means 3 disposed in the position where a laser beam emitted from the laser beam source is made incident. A transmission area to transmit the laser beam is demarcated in a shield area to shield the incident laser beam. The transmission area is smaller than the cross section of the laser beam at its area. The laser beam transmitted through the transmission area is made incident to the surface to be machined. The transmission area can be displaced in a direction crossing the advancing direction of the laser beam. The beam incident position displacing means 3 displaces the incident position of the laser beam in the surface to be machined by the displacement of the transmission area. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
