发明名称 MIST SEPARATOR, AND SUBSTRATE PROCESSING APPARATUS PROVIDED THEREWITH
摘要 PROBLEM TO BE SOLVED: To provide a mist separator capable of efficiently and stably separating and recovering mist particles or the like of process liquid from circulating air. SOLUTION: The mist separator 1 is configured to form gas flows 10 in a housing 2 by arranging a plurality of corrugated sheets 3 in the housing 2 in parallel with each other, and each of the corrugated sheets 3 is formed with a plurality of baffles 8. Each corrugated sheet includes a plurality of arcuate parts 7 and a plurality of straight lines 6, and each bubble 8 is configured to be projected toward upperstream. Further, ruggedness is formed on the surface of each corrugated sheet 3 by fitting a plurality of rod members 9 to each corrugated sheet 3. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005252100(A) 申请公布日期 2005.09.15
申请号 JP20040062727 申请日期 2004.03.05
申请人 SHINWA CONTROLS CO LTD 发明人 KAWABE TOYOTARO;TSUTSUMI KENICHIRO;NAKAMURA SUEHIRO;OGAWA KAZUNORI
分类号 B01D45/08;H01L21/027;H01L21/306;(IPC1-7):H01L21/027 主分类号 B01D45/08
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