发明名称 System and method for fabricating a crystalline thin structure
摘要 A crystalline thin structure ( 104, 204, 404 ) is grown on a surface ( 108, 228 ) of a substrate ( 112, 208, 400 ) by depositing molecules ( 136, 220 ) from a molecular precursor to a lateral growth front ( 144, 224 ) of the structure using a crystal grower ( 116, 200 ). In one embodiment, the crystal grower comprises a solution ( 124 ) containing the molecular precursor in a solvent ( 140 ). Molecules are added to the lateral growth front by moving one or both of the free surface ( 120, 120 ') of the solution and deposition surface relative to the other at a predetermined rate. In another embodiment, the crystal grower comprises a mask ( 212 ) that includes at least one opening ( 216 ). Precursor molecules are vacuum deposited via a molecular beam ( 236 ) at the growth front ( 228 ) of the crystalline thin structure ( 204 ) as one or both of the opening and surface are moved relative to the other at a predetermined rate.
申请公布号 US2005199181(A1) 申请公布日期 2005.09.15
申请号 US20050078544 申请日期 2005.03.11
申请人 THE UNIVERSITY OF VERMONT AND STATE AGRICULTURAL COLLEGE 发明人 HEADRICK RANDALL L.
分类号 B32B9/04;C30B1/00;C30B3/00;C30B5/00;C30B28/02;H01L51/00;H01L51/40;(IPC1-7):C30B1/00 主分类号 B32B9/04
代理机构 代理人
主权项
地址